Altering shear thickening in fumed silica suspensions using nanoparticles
Date
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
United States Patent and Trademark Office
Abstract
Description
Slurry compositions useable in chemical mechanical polishing processes, as well as methods of making and methods of using the same, are described.
item.page.type
Text
patent
patent
item.page.format
application/pdf
Keywords
H01L21/3105, C09G1/02, C09K3/14, H01L21/306