Altering shear thickening in fumed silica suspensions using nanoparticles

Slurry compositions useable in chemical mechanical polishing processes, as well as methods of making and methods of using the same, are described.
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Abstract/Description: Slurry compositions useable in chemical mechanical polishing processes, as well as methods of making and methods of using the same, are described.
Subject(s): H01L21/3105
C09G1/02
C09K3/14
H01L21/306
Date Issued: 2021-03-02
Title: Altering shear thickening in fumed silica suspensions using nanoparticles.
Name(s): Liberatore, Matthew, inventor
Fakhrabadi, Ehsan Akbari, inventor
The University of Toledo, assignee
Type of Resource: text
Genre: patent
Date Issued: 2021-03-02
Other Date: Date Filed: 2019-05-21
Publisher: United States Patent and Trademark Office
Physical Form: application/pdf
Extent: 39 p.
Abstract/Description: Slurry compositions useable in chemical mechanical polishing processes, as well as methods of making and methods of using the same, are described.
Identifier(s): utpatents-US10934457 (IID)
Patent No.: US10934457 (patno)
Appl. No.: 16/417895 (appno)
Subject(s): H01L21/3105
C09G1/02
C09K3/14
H01L21/306
Held by: United States Patent and Trademark Office (USPTO) Public Search Facility
Location: University of Toledo Digital Repository
Rights Statement: No Copyright - United States
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