Method of producing organo indium chlorides
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Abstract/Description: | A method for producing organo metal chlorides directly from molten metal. The organo metal chlorides are formed by contacting an organo chloride directly with a metal melt. The preferred method includes the use of indium as the metal and methyl chloride as the organo chloride. The direct contact of the methyl chloride with the indium metal results in the production of dimethyl indium chloride or methyl indium dichloride depending on the contacting time and efficiency of the process. The resulting products are suitable for use as a precursor gas for chemical vapor deposition processes. Additionally, activator compounds such as oxides or halides are optionally added to the metal melt to enhance the reaction rate. |
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Subject(s): | 556/1 |
Date Issued: | 1998-10-06 |
Title: | Method of producing organo indium chlorides. |
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Name(s): |
Libbey-Owens-Ford Co., assignee Giolando, Dean M., inventor |
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Type of Resource: | text | |
Genre: | patent | |
Publisher: | United States Patent and Trademark Office | |
Other Date: | Date Filed: 1997-06-10 | |
Date Issued: | 1998-10-06 | |
Physical Form: | application/pdf | |
Extent: | 8 p. | |
Abstract/Description: | A method for producing organo metal chlorides directly from molten metal. The organo metal chlorides are formed by contacting an organo chloride directly with a metal melt. The preferred method includes the use of indium as the metal and methyl chloride as the organo chloride. The direct contact of the methyl chloride with the indium metal results in the production of dimethyl indium chloride or methyl indium dichloride depending on the contacting time and efficiency of the process. The resulting products are suitable for use as a precursor gas for chemical vapor deposition processes. Additionally, activator compounds such as oxides or halides are optionally added to the metal melt to enhance the reaction rate. | |
Identifier(s): |
utpatents-US5817847 (IID) Patent No.: US5817847 (patno) Appl. No.: 08/871934 (appno) |
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Subject(s): | 556/1 | |
Held by: | United States Patent and Trademark Office (USPTO) Public Search Facility | |
Location: | University of Toledo Digital Repository | |
Rights Statement: | No Copyright - United States | |
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